A new method or temperature mapping on GaAs field effect transistors

被引:4
作者
Martina, E
Landesman, JP
Braun, P
Fily, A
机构
[1] Thomson CSF, Cent Rech Lab, F-91404 Orsay, France
[2] United Monolith Semicond GmbH, D-89081 Ulm, Germany
来源
MICROELECTRONICS AND RELIABILITY | 1998年 / 38卷 / 6-8期
关键词
D O I
10.1016/S0026-2714(98)00095-X
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, a method is described, how to apply the technique of spatially resolved photoluminescence (PL) spectroscopy for the measurement of the local channel temperature in GsAs-based field effect transistors. This spectroscopic technique uses a focused laser beam which scans directly the surface of a chip inside its package. The temperature is deduced from the corresponding wavelength shift of the PL peak. In the case of a typical heterostructure-based transistor (like the pseudomorphic high electron mobility transistors studied here) a spatial resolution of 1 mu m and a temperature resolution of +/- 1 degrees C is demonstrated. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:1245 / 1250
页数:6
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