Propagation loss measurement for surface plasmon-polariton modes at metal waveguides on semiconductor substrates

被引:56
作者
Goto, T
Katagiri, Y
Fukuda, H
Shinojima, H
Nakano, Y
Kobayashi, I
Mitsuoka, Y
机构
[1] NTT Corp, Microsyst Integrat Labs, Atsugi, Kanagawa 2430198, Japan
[2] Univ Tokyo, Adv Sci & Technol Res Ctr, Bunkyo Ku, Tokyo 1138656, Japan
[3] Univ Tokyo, Sch Engn, Dept Syst Innovat, Bunkyo Ku, Tokyo 1138656, Japan
[4] Seiko Instruments, Matsudo, Chiba 2702222, Japan
关键词
D O I
10.1063/1.1645990
中图分类号
O59 [应用物理学];
学科分类号
摘要
Propagation losses were measured for surface plasmon-polariton (SPP) modes at metal waveguides on semiconductor substrates. The waveguides are simple strips of Au or Al deposited on InP substrates or 300-nm-thick SiO2 film covering the InP substrates. We used a direct method that can clearly discriminate SPP modes in vidicon-camera images, thereby allowing quantitative measurements. The loss coefficients measured at a wavelength of 1.55 mum were, as predicted by theory, in the range of 8.5-17 dB/mm, which shows the waveguides are feasible for practical applications. (C) 2004 American Institute of Physics.
引用
收藏
页码:852 / 854
页数:3
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