Single-material TiO2 double-layer antireflection coatings

被引：213

作者：

Richards, BS ^{[1
]}

机构：

[1] Univ New S Wales, Ctr Photovolta Engn, Sydney, NSW 2052, Australia

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2003年 / 79卷 / 03期

基金：

澳大利亚研究理事会;

关键词：

titanium dioxides; antireflection coating; double-layer; DLAR; spectroscopic ellipsometry;

D O I：

10.1016/S0927-0248(02)00473-7

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

This paper demonstrates that a double-layer antireflection (DLAR) coating call he fabricated using a single material, titanium dioxide (TiO2). The optical properties of the top and bottom TiO2 layers were controlled by varying the deposition and sintering conditions, resulting in a range of refractive indices, n = 1.73-2.63 at 600 nm. Weighted average reflectances of 6.5% (measured) and 7.0% (calculated) were achieved for TiO2 DLAR coatings in air and under glass, respectively. When implemented in a high-efficiency silicon solar cell, a short-circuit current density increase of DeltaJ(sc) = 2.5 mA/cm(2) can be expected for an optimised TiO2 DLAR coating when compared to a commercial TiO2 single-layer antireflection coating. Crown Copyright (C) 2003 Published by Elsevier Science B.V. All rights reserved.

引用

页码：369 / 390

页数：22

共 60 条

[1] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302

[2] Deposition and modification of titanium dioxide thin films by filtered arc deposition [J].

Bendavid, A ;

Martin, PJ ;

Takikawa, H .

THIN SOLID FILMS, 2000, 360 (1-2) :241-249

[3] REFRACTIVE-INDEX AND INHOMOGENEITY OF THIN-FILMS [J].

BORGOGNO, JP ;

FLORY, F ;

ROCHE, P ;

SCHMITT, B ;

ALBRAND, G ;

PELLETIER, E ;

MACLEOD, HA .

APPLIED OPTICS, 1984, 23 (20) :3567-3570

[4] Titanium dioxide (TiO2)-based gate insulators [J].

Campbell, SA ;

Kim, HS ;

Gilmer, DC ;

He, B ;

Ma, T ;

Gladfelter, WL .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1999, 43 (03) :383-392

[5] PC1D version 5: 32-bit solar cell modeling on personal computers [J].

Clugston, DA ;

Basore, PA .

CONFERENCE RECORD OF THE TWENTY SIXTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 1997, 1997, :207-210

[6] Degradation of surface quality due to anti-reflective coating deposition on silicon solar cells [J].

Cudzinovic, M ;

Pass, T ;

Terao, A ;

Verlinden, PJ ;

Swanson, RM .

CONFERENCE RECORD OF THE TWENTY-EIGHTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 2000, 2000, :295-298

[7] ESTIMATE OF THE DEGREE OF INHOMOGENEITY OF THE REFRACTIVE-INDEX OF DIELECTRIC FILMS FROM SPECTROSCOPIC ELLIPSOMETRY [J].

DELARIVIERE, GP ;

FRIGERIO, JM ;

RIVORY, J ;

ABELES, F .

APPLIED OPTICS, 1992, 31 (28) :6056-6061

[8] Characterization and optimization of absorbing plasma-enhanced chemical vapor deposited antireflection coatings for silicon photovoltaics [J].

Doshi, P ;

Jellison, GE ;

Rohatgi, A .

APPLIED OPTICS, 1997, 36 (30) :7826-7837

[9] TIO2 FILM PROPERTIES AS A FUNCTION OF PROCESSING TEMPERATURE [J].

FITZGIBBONS, ET ;

SLADEK, KJ ;

HARTWIG, WH .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (06) :735-+

[10]

FOROUHI AR, 1991, HDB OPTICAL CONSTANT, V2, P151

← 1 2 3 4 5 6 →