Biaxially oriented conductive La0.5Sr0.5CoO3 thin films on SiO2/Si

被引：7

作者：

Jia, QX ^{[1
]}

Arendt, PN ^{[1
]}

Kwon, C ^{[1
]}

Roper, JM ^{[1
]}

Fan, Y ^{[1
]}

Groves, JR ^{[1
]}

Foltyn, SR ^{[1
]}

机构：

[1] Univ Calif Los Alamos Natl Lab, Div Mat Sci & Technol, Los Alamos, NM 87545 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1998年 / 16卷 / 03期

关键词：

D O I：

10.1116/1.581155

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We have grown biaxially textured La0.5Sr0.5CoO3 (LSCO) thin films on technically important SiO2/Si substrates by pulsed laser deposition, where a biaxially oriented yttria-stabilized zirconia (YSZ) produced by ion-beam-assisted deposition (IBAD) is used as a seed layer to enhance the texture of LSCO on SiO2/Si. The degree of in-plane texturing of LSCO is directly related to the quality of IBAD-YSZ. The smaller the value of full width at half maximum of the IBAD-YSZ (220) diffraction peak, the higher the crystallinity of the LSCO film. The biaxially oriented LSCO film deposited at 700 degrees C on SiO2/Si shows metallic resistivity versus temperature characteristics and has a room-temperature resistivity of around 110 mu Ohm cm. (C) 1998 American Vacuum Society.

引用

页码：1380 / 1383

页数：4