Structure and expected piezoelectric properties of sol-gel derived multilayer PZT films

被引：8

作者：

Miyazawa, K

Maeda, R

Ito, K

机构：

[1] Univ Tokyo, Sch Engn, Dept Mat Sci, Bunkyo Ku, Tokyo 113, Japan

[2] Minist Int Trade & Ind, Agcy Ind Sci & Technol, Mech Engn Lab, Tsukuba, Ibaraki 305, Japan

来源：

SOLID STATE IONICS | 1998年 / 108卷 / 1-4期

关键词：

multilayer; piezoelectricity; porosity; PZT; refractive index; sol-gel; TEM;

D O I：

10.1016/S0167-2738(98)00023-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Multilayer duplex PZT films consisting of alternating porous and dense layers have been formed by a sol-gel repeated coating method with a heating rate of 100 degrees C min(-1). Structure and porosity of the films are examined by XRD, TEM and FT-IR. The porosity of the multilayer films fired at 600 degrees C is increased by heat treatment at 750 degrees C. The volume fraction of the pyrochlore phase decreases with increasing coating time. The relative dielectric constant of multilayer films with thickness 12 mu m ranges from 1100 (10 000 Hz) to 1400 (100 Hz). The piezoelectric voltage coefficient g(33), of the multilayer films is calculated to be enhanced by the introduction of layers with a high porosity. (C) 1998 Elsevier Science B.V. All rights reserved.

引用

页码：85 / 90

页数：6

共 10 条

[1]

BANNO H, 1987, AM CERAM SOC BULL, V66, P1332

[2]

BORN M, 1980, PRINCIPLES OPTICS, P87

[3] ACOUSTIC AND ELASTIC PROPERTIES OF PZT CERAMICS WITH ANISOTROPIC PORES [J].