AFM probes with directly fabricated tips

被引：67

作者：

Boisen, A

Hansen, O

Bouwstra, S

机构：

[1] Microelectronics Centre (MIC), Technical University of Denmark, Building 345E

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1996年 / 6卷 / 01期

关键词：

D O I：

10.1088/0960-1317/6/1/012

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Different fabrication technologies for atomic force microscopy (AFM) probes have been investigated, emphasizing the fabrication of versatile tip shapes, which can be integrated with micromachined cantilevers. By successive reactive ion etching processing steps, novel high-aspect-ratio tip shapes have been produced and integrated with AFM cantilevers. The performance of the fabricated tips has been investigated by scanning test structures in an atomic force microscope.

引用

页码：58 / 62

页数：5

共 6 条

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