TIP ARTIFACTS IN SCANNING FORCE MICROSCOPY

被引:100
作者
SCHWARZ, UD [1 ]
HAEFKE, H [1 ]
REIMANN, P [1 ]
GUNTHERODT, HJ [1 ]
机构
[1] UNIV BASEL,INST PHYS,CH-4056 BASEL,SWITZERLAND
来源
JOURNAL OF MICROSCOPY-OXFORD | 1994年 / 173卷
关键词
SCANNING FORCE MICROSCOPY; SCANNING PROBE METHODS; TIP ARTIFACTS; TIP FABRICATION; ELECTRON-BEAM-DEPOSITED TIPS; SURFACE ROUGHNESS; METROLOGY;
D O I
10.1111/j.1365-2818.1994.tb03441.x
中图分类号
TH742 [显微镜];
学科分类号
摘要
Since its invention in 1986, scanning force microscopy (SFM) has experienced great success as a characterization method for topography on small scales. In spite of the enormous potential of the method, it is limited by the quality of the tip used for probing the surface topography. Convolutions of non-ideal tip shapes with the real topography and tip bending, flexing and jumping effects produce artefacts in the resulting images. A brief description of the preparation and characteristics of the most commonly used SFM tips is given. A variety of different artefacts originating from tip properties is presented and illustrated with selected scanning force micrographs. Methods to minimize tip artefacts in SFM images are described.
引用
收藏
页码:183 / 197
页数:15
相关论文
共 63 条
  • [1] NEW SCANNING TUNNELING MICROSCOPY TIP FOR MEASURING SURFACE-TOPOGRAPHY
    AKAMA, Y
    NISHIMURA, E
    SAKAI, A
    MURAKAMI, H
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (01): : 429 - 433
  • [2] IMPROVED ATOMIC FORCE MICROSCOPE IMAGES USING MICROCANTILEVERS WITH SHARP TIPS
    AKAMINE, S
    BARRETT, RC
    QUATE, CF
    [J]. APPLIED PHYSICS LETTERS, 1990, 57 (03) : 316 - 318
  • [3] ATOMIC RESOLUTION IMAGING OF A NONCONDUCTOR BY ATOMIC FORCE MICROSCOPY
    ALBRECHT, TR
    QUATE, CF
    [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (07) : 2599 - 2602
  • [4] MICROFABRICATION OF CANTILEVER STYLI FOR THE ATOMIC FORCE MICROSCOPE
    ALBRECHT, TR
    AKAMINE, S
    CARVER, TE
    QUATE, CF
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04): : 3386 - 3396
  • [5] ALLEN MJ, 1992, ULTRAMICROSCOPY, V42, P10925
  • [6] ANGELL JB, 1983, SCI AM APR, P36
  • [7] ATOMIC FORCE MICROSCOPE
    BINNIG, G
    QUATE, CF
    GERBER, C
    [J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
  • [8] ATOMIC RESOLUTION WITH ATOMIC FORCE MICROSCOPE
    BINNIG, G
    GERBER, C
    STOLL, E
    ALBRECHT, TR
    QUATE, CF
    [J]. EUROPHYSICS LETTERS, 1987, 3 (12): : 1281 - 1286
  • [9] SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY
    BINNING, G
    ROHRER, H
    GERBER, C
    WEIBEL, E
    [J]. PHYSICAL REVIEW LETTERS, 1982, 49 (01) : 57 - 61
  • [10] SILICON CANTILEVERS AND TIPS FOR SCANNING FORCE MICROSCOPY
    BRUGGER, J
    BUSER, RA
    DEROOIJ, NF
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1992, 34 (03) : 193 - 200