Thickness-dependent properties of sprayed cobalt oxide thin films

被引:65
作者
Kadam, LD [1 ]
Patil, PS [1 ]
机构
[1] Shivaji Univ, Dept Phys, Thin Film Phys Lab, Kolhapur 416004, Maharashtra, India
关键词
cobalt oxide thin films; pneumatic spray pyrolysis technique; X-ray diffraction; electrical resistivity;
D O I
10.1016/S0254-0584(00)00367-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Cobalt oxide thin films with variable thickness were deposited by pneumatic spray pyrolysis technique (PSPT) onto the amorphous glass substrates kept at 300 degreesC. The quantity of cobalt chloride solution was varied to obtain cobalt oxide thin films with thickness ranging from 0.9 to 1.7 mum. The effect of film thickness on structural, electrical and optical properties was studied. The X-ray diffraction (XRD) studies revealed that the crystallinity of the cobalt oxide film ameliorates with film thickness. Consequently, the room temperature electrical resistivity of the film decreases from 2.1 x 10(4) to 9 x 10(2) Ohm cm with increase in film thickness. Optical absorption studies reveal that cobalt oxide thin films exhibit optical transition by both the direct and indirect transitions. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
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页码:225 / 232
页数:8
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