Reversible and irreversible control of optical properties of porous silicon superlattices by thermal oxidation, vapor adsorption, and liquid penetration

被引：30

作者：

Zangooie, S ^{[1
]}

Jansson, R ^{[1
]}

Arwin, H ^{[1
]}

机构：

[1] Linkoping Univ, Dept Phys & Measurement Technol, S-58183 Linkoping, Sweden

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1998年 / 16卷 / 05期

关键词：

D O I：

10.1116/1.581438

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Optical properties of porous silicon superlattices are investigated using variable angle spectroscopic ellipsometry. Different phenomena such as in-depth inhomogeneities and interface transition regions are resolved and studied using various optical models. The optical properties of the samples are modified irreversibly by thermal oxidation yielding a blueshift of the reflectance. A reversible redshift of the spectra is obtained by vapor adsorption and liquid penetration into the superlattice. Moreover, existence of different specific internal surface areas and pore size distributions in the low and high index sublayers of the material is proposed. (C) 1998 American Vacuum Society. [S0734-2101(98)02505-6].

引用

页码：2901 / 2912

页数：12

共 47 条

[1] CHEMICAL SURFACE MODIFICATION OF POROUS SILICON [J].

ANDERSON, RC ;

MULLER, RS ;

TOBIAS, CW .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (05) :1393-1396

[2] Optical cavity based on porous silicon superlattice technology [J].

Araki, M ;

Koyama, H ;

Koshida, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (2B) :1041-1044

[3]

Azzam R.M.A., 1997, ELLIPSOMETRY POLARIZ

[4] INVESTIGATION AND DESIGN OF OPTICAL-PROPERTIES OF POROSITY SUPERLATTICES [J].

BERGER, MG ;

THONISSEN, M ;

ARENSFISCHER, R ;

MUNDER, H ;

LUTH, H ;

ARNTZEN, M ;

THEISS, W .

THIN SOLID FILMS, 1995, 255 (1-2) :313-316

[5] POROSITY SUPERLATTICES - A NEW CLASS OF SI HETEROSTRUCTURES [J].

BERGER, MG ;

DIEKER, C ;

THONISSEN, M ;

VESCAN, L ;

LUTH, H ;

MUNDER, H ;

THEISS, W ;

WERNKE, M ;

GROSSE, P .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1994, 27 (06) :1333-1336

[6]

BERGER MG, 1995, MATER RES SOC SYMP P, V358, P327

[7] Dielectric filters made of PS: Advanced performance by oxidation and new layer structures [J].

Berger, MG ;

ArensFischer, R ;

Thonissen, M ;

Kruger, M ;

Billat, S ;

Luth, H ;

Hilbrich, S ;

Theiss, W ;

Grosse, P .

THIN SOLID FILMS, 1997, 297 (1-2) :237-240

[8] Influence of etch stops on the microstructure of porous silicon layers [J].

Billat, S ;

Thonissen, M ;

ArensFischer, R ;

Berger, MG ;

Kruger, M ;

Luth, H .

THIN SOLID FILMS, 1997, 297 (1-2) :22-25

[9] Color changes in thin porous silicon films caused by vapor exposure [J].

Bjorklund, RB ;

Zangooie, S ;

Arwin, H .

APPLIED PHYSICS LETTERS, 1996, 69 (20) :3001-3003

[10] Adsorption of surfactants in porous silicon films [J].

Bjorklund, RB ;

Zangooie, S ;

Arwin, H .

LANGMUIR, 1997, 13 (06) :1440-1445

← 1 2 3 4 5 →