A round robin experiment of elemental sensitivity factors in low-energy ion scattering

被引：23

作者：

Brongersma, HH

Carrere-Fontaine, H

Cortenraad, R

van der Gon, AWD

Scanlon, PJ

Spolveri, I

Cortigiani, B

Bardi, U

Taglauer, E

Reiter, S

Labich, S

Bertrand, P

Houssiau, L

Speller, S

Parascandola, S

Unlu-Lachnitt, H

Heiland, W ^{[1
]}

机构：

[1] Univ Osnabruck, Fachbereich Phys, D-38023 Osnabruck, Germany

[2] TU Eindhoven, Fac Phys, NL-5600 MB Eindhoven, Netherlands

[3] Univ Florence, Dipartimento Chim, I-50121 Florence, Italy

[4] Max Planck Inst Plasmaphys, D-85748 Garching, Germany

[5] Univ Catholique Louvain, PCPM, B-1348 Louvain, Belgium

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1998年 / 142卷 / 03期

关键词：

low-energy ion scattering; LEIS; ion-solid interactions; surface analysis;

D O I：

10.1016/S0168-583X(98)00264-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In a round robin experiment a set of five polycrystalline, metallic samples is studied by low-energy ion scattering (LEIS) in five different laboratories, The energy range is 0.6-3.5 keV and He and Ne ions are used. Even though different experimental setups are used the evaluated elemental sensitivity factors agree within +/-20%. Reproducibility within single laboratories is better than 10%. In an additional study carried out in three laboratories the surface composition of an alloy, Cu55Pd45, was determined, using in situ calibration standards, These surface composition measurements agreed within +/-3 at% demonstrating that quantitative composition determination is possible using this procedure. (C) 1998 Elsevier Science B.V. All rights reserved.

引用

页码：377 / 386

页数：10

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