Shadowed sputtering of gold on V-shaped microtrenches etched in silicon and applications in microfabrication

被引：26

作者：

Xia, YN ^{[1
]}

Whitesides, GM ^{[1
]}

机构：

[1] HARVARD UNIV,DEPT CHEM,CAMBRIDGE,MA 02138

来源：

ADVANCED MATERIALS | 1996年 / 8卷 / 09期

关键词：

D O I：

10.1002/adma.19960080915

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Silicon micromachining has a wide range of applications in,for example, microelectronics. Here, a combination of several techniques is used in modifying the surface properties of V-shaped microtrenches (see Figure) and for fabricating complex surface relief structures.

引用

页码：765 / &

页数：5

共 26 条

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