Influence of stress in thin film modulus measurements by the vibrating reed technique

被引：21

作者：

Harms, U ^{[1
]}

Kempen, L ^{[1
]}

Neuhauser, H ^{[1
]}

机构：

[1] Tech Univ Braunschweig, Inst Met Phys & Nukl Festkorperphys, D-38106 Braunschweig, Germany

来源：

THIN SOLID FILMS | 1998年 / 323卷 / 1-2期

关键词：

film stress; Young's modulus; vibrating reed; torsional vibration;

D O I：

10.1016/S0040-6090(97)01026-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

One method to measure thin film elastic properties is use of the vibrating reed technique to compare stiffness of uncoated and coated cantilever beams. Since the change of frequency is used to calculate the modulus, the change of frequency caused by curvature due to film stress has to be investigated. We present simultaneous measurement of resonant frequencies and curvature to show that curvature can cause large effects, depending on the geometry. An approximate calculation indicates in which cases stress may be neglected. A method to determine stress from combination of torsional and flexural vibrating frequency measurements is proposed. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：153 / 157

页数：5

共 11 条

[1]

BOHN HG, 1994, J PHYS CHEM SOLIDS, V55, P157

[2] Micromachined silicon cantilever beams for thin-film stress measurement [J].

Cardinale, GF ;

Howitt, DG ;

Clift, WM ;

McCarty, KF ;

Medlin, DL ;

Mirkarimi, PB ;

Moody, NR .

THIN SOLID FILMS, 1996, 287 (1-2) :214-219

[3] HIGH TEMPERATURE ELASTIC MODULI OF ALUMINUM [J].

GERLICH, D ;

FISHER, ES .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1969, 30 (05) :1197-+

[4] Internal friction of amorphous Zr65Al7.5Cu27.5-films [J].

Kempen, L ;

Harms, U ;

Neuhauser, H ;

Scholz, D ;

Peiner, E ;

Schlachetzki, A .

JOURNAL DE PHYSIQUE IV, 1996, 6 (C8) :643-646

[5]

LandaDu L. D., 1959, COURSE THEORETICAL P, V7

[6]

LEHMANN T, 1975, ELEMENTE MECH, V2

[7] THE ELASTICITY MEASUREMENTS OF ALUMINUM NM-FILMS [J].

MIZUBAYASHI, H ;

YOSHIHARA, Y ;

OKUDA, S .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1992, 129 (02) :475-481

[8]

Nowick A. S., 1972, ANELASTIC RELAXATION

[9]

SCHOLZ D, 1995, P MIKROMAT 95, P557

[10]

SHABANA AA, 1991, THEORY VIBRATION, V2

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