Some considerations of reduction of reference phase error in phase-stepping interferometry

被引：33

作者：

Schwider, J ^{[1
]}

Dresel, T ^{[1
]}

Manzke, B ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Lehrsthl Opt, D-91058 Erlangen, Germany

来源：

APPLIED OPTICS | 1999年 / 38卷 / 04期

关键词：

D O I：

10.1364/AO.38.000655

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Positioning errors and miscalibrations of the phase-stepping device in a phase-stepping interferometer lead to systematic errors proportional to twice the measured phase distribution. We discuss the historical development of various error-compensating phase-shift algorithms from a unified mathematical point of view. Furthermore, we demonstrate experimentally that systematic errors can also be removed a posteriori. A Twyman-Green-type microlens test interferometer was used for the experiments. (C) 1999 Optical Society of America OCIS codes: 050.5080, 120.3180, 120.5050, 220.4840.

引用

页码：655 / 659

页数：5

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