ACCURACY OF PHASE-SHIFTING INTERFEROMETRY

被引：180

作者：

KINNSTAETTER, K

LOHMANN, AW

SCHWIDER, J

STREIBL, N

机构：

来源：

关键词：

D O I：

10.1364/AO.27.005082

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：5082 / 5089

页数：8

共 11 条

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