Electro-optic properties of Pb(Zr1-xTix)O3 (X=0, 0.3, 0.6) films prepared by aerosol deposition

We measured annealing temperature and the Zr-to-Ti concentration ratio dependence of the electro-optic (EO) effect for highly transparent Pb(Zr1-xTix)O-3 [PZT] films more than 1 mu m thick, directly deposited on glass substrates by aerosol deposition (AD). X-ray diffraction patterns show that as-deposited AD films have a large strain and lattice distortions, and these affects can be attenuated by increasing annealing temperature. The dielectric constant of AD-PZT films increased with annealing temperature, which is consistent with the X-ray diffraction measurement. The EO effect was enhanced with increasing Zr concentration, and a linear EO coefficient (r(c)) of 102 pm/V was obtained for the PbZr0.6T0.4O3 film annealed at 600 degrees C, whose composition is near its morphotropic phase boundary. The r(c) of PbZr0.6T0.4O3 films increased with annealing temperature, and the film annealed at 850 degrees C showed an r(c) of 168 pm/V. The EO measurements show that AD is a highly promising film-deposition method for optical devices such as EO modulators and optical switches.