Three-dimensional photonic devices fabricated in glass by use of a femtosecond laser oscillator

被引：148

作者：

Kowalevicz, AM

Sharma, V

Ippen, EP

Fujimoto, JG

Minoshima, K

机构：

[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

[2] MIT, Elect Res Lab, Cambridge, MA 02139 USA

[3] AIST, Tsukuba, Ibaraki 3058563, Japan

来源：

OPTICS LETTERS | 2005年 / 30卷 / 09期

关键词：

D O I：

10.1364/OL.30.001060

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Three-dimensional photonic waveguide devices are fabricated in glass by use of femtosecond pulses from an extended-cavity laser oscillator. Three-dimensional devices, including a symmetric three-waveguide directional coupler and a three-dimensional microring resonator, are fabricated and tested. Waveguides can be fabricated at depths of -1 mm inside a glass substrate, thus demonstrating the capability of achieving dramatic increases in device density. These results demonstrate the potential to fabricate new classes of devices that are not possible in two dimensions. (c) 2005 Optical Society of America.

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页码：1060 / 1062

页数：3

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