Carbon nanotubes for microelectronics?

被引：78

作者：

Graham, AP ^{[1
]}

Duesberg, GS ^{[1
]}

Seidel, RV ^{[1
]}

Liebau, M ^{[1
]}

Unger, E ^{[1
]}

Pamler, W ^{[1
]}

Kreupl, F ^{[1
]}

Hoenlein, W ^{[1
]}

机构：

[1] Infineon Technol AG, Corp Res, D-81739 Munich, Germany

来源：

SMALL | 2005年 / 1卷 / 04期

关键词：

carbon nanotubes; interconnects; microelectronics; transistors;

D O I：

10.1002/smll.200500009

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Despite all prophecies of its end, silicon-based microelectronics still,follows Moore's Law and continues to develop rapidly. However, the inherent physical limits will eventually be reached. Carbon nanotubes offer the potential for further miniaturization as long as it is possible to selectively deposit them with defined properties.

引用

页码：382 / 390

页数：9

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