Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon

被引：42

作者：

Comtois, JH

Michalicek, MA

Barron, CC ^{[1
]}

机构：

[1] USAF, Res Lab, Kirtland AFB, NM 87117 USA

[2] US DOE, Sandia Natl Labs, Kirtland AFB, NM 87117 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 70卷 / 1-2期

关键词：

microactuators; micromotors; polysilicon; surface micromachining; SUMMiT;

D O I：

10.1016/S0924-4247(98)00108-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the results of tests performed on a variety of electrothermal microactuators and arrays of these actuators. The results are intended to aid designers of thermally actuated mechanisms, and they would apply to any surface micromachined polysilicon MEMS processes. Results presented include force and deflection vs, input power, maximum operating frequency, and the effects of long term operation. The end result is a set of proposed ideal actuator and array geometries for different applications' force requirements. In addition, various methods of arraying these actuators together are presented. Comparisons of these arraying methods allow the designer to choose which method best matches the fabrication process available and the application requirements. Finally, a thermally actuated stepper motor is used to demonstrate a useful application of these arrays. (C) 1998 Published by Elsevier Science S.A. All rights reserved.

引用

页码：23 / 31

页数：9

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