Development of in-situ laser vacuum annealing and sealing processes for an application to field emission displays

被引：2

作者：

Song, BG ^{[1
]}

Cha, SN ^{[1
]}

Park, NS ^{[1
]}

Lee, NS ^{[1
]}

Kim, JM ^{[1
]}

Shin, JS ^{[1
]}

Lee, CH ^{[1
]}

Kim, CO ^{[1
]}

Hong, JP ^{[1
]}

机构：

[1] Samsung Adv Inst Technol, FED Project Team, Suwon 440600, South Korea

来源：

IVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE | 2001年

关键词：

D O I：

10.1109/IVMC.2001.939732

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：219 / 220

页数：2

共 4 条

[1] Improved performance of nonevaporable getter activated by a continuous wave infrared laser [J].

Cha, SN ;

Choung, JY ;

Song, BG ;

Choi, JM ;

Han, IT ;

Park, NS ;

Jung, JE ;

Lee, NS ;

Kim, JM ;

Chee, JK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (03) :870-873

[2]

COURREGES F, 1996, INT S SOC INF DISPL, P45

[3] AN UPDATED REVIEW OF GETTERS AND GETTERING [J].

GIORGI, TA ;

FERRARIO, B ;

STOREY, B .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1985, 3 (02) :417-423

[4] Reliability analysis of 4 in field-emission display [J].

Kim, JM ;

Hong, JP ;

Kim, JW ;

Choi, JH ;

Park, NS ;

Kang, JH ;

Jang, JE ;

Ryu, YS ;

Yang, HC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (02) :528-532

← 1 →