Structural and compositional analyses on indium sulfide thin films deposited in aqueous chemical bath containing indium chloride and thioacetamide

被引:30
作者
Yamaguchi, K [1 ]
Yoshida, T [1 ]
Minoura, H [1 ]
机构
[1] Gifu Univ, Grad Sch Engn, ERES Div, Gifu 5011193, Japan
关键词
chemical bath deposition; indium sulphide; indium hydroxysulfide; thioacetamide;
D O I
10.1016/S0040-6090(03)00152-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Chemical bath deposition of indium sulfide thin films from aqueous mixtures containing indium chloride and thioacetamide under the two extreme reaction conditions, namely, at 30 and 70 degreesC, has been examined in order to obtain further insights for understanding the reaction mechanism. The S/In ratio of both the films and the precipitates was low at the early stage of the reaction and it gradually increases to 1.5, which corresponds to the stoichiometric composition of In2S3. X-ray analyses of the films have indicated the formation of amorphous indium hydroxysulfide in the early stage, followed by the formation of nanocrystalline indium sulfide in the late stage of the film growth. The films deposited at 30 degreesC had a cauliflower-like morphology, whereas the fibrous structure was observed at 70 degreesC. It is inferred that the rate-determining step for the film growth at the higher temperature is not identical to that at the lower temperature. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:354 / 358
页数:5
相关论文
共 17 条
[1]   Structure and morphology of the indium hydroxy sulphide thin films [J].
Bayón, R ;
Herrero, J .
APPLIED SURFACE SCIENCE, 2000, 158 (1-2) :49-57
[2]   Preparation of indium hydroxy sulfide Inx(OH)ySz thin films by chemical bath deposition [J].
Bayon, R ;
Guillen, C ;
Martinez, MA ;
Gutierrez, MT ;
Herrero, J .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (08) :2775-2779
[3]   Growth mechanism of CBD-In(OH)xSy thin films [J].
Bayón, R ;
Hernández-Mayoral, M ;
Herrero, J .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (01) :C59-C67
[4]   Reaction mechanism and kinetics for the chemical bath deposition of In(OH)xSy thin films [J].
Bayón, R ;
Herrero, J .
THIN SOLID FILMS, 2001, 387 (1-2) :111-114
[5]   Chemical bath deposition of indium hydroxy sulphide thin films:: process and XPS characterization [J].
Bayón, R ;
Mafftiotte, C ;
Herrero, J .
THIN SOLID FILMS, 1999, 353 (1-2) :100-107
[6]   QUANTUM-SIZE EFFECTS IN THE STUDY OF CHEMICAL SOLUTION DEPOSITION MECHANISMS OF SEMICONDUCTOR-FILMS [J].
GORER, S ;
HODES, G .
JOURNAL OF PHYSICAL CHEMISTRY, 1994, 98 (20) :5338-5346
[7]   A novel cadmium free buffer layer for Cu(In,Ga)Se-2 based solar cells [J].
Hariskos, D ;
Ruckh, M ;
Ruhle, U ;
Walter, T ;
Schock, HW ;
Hedstrom, J ;
Stolt, L .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1996, 41-2 :345-353
[8]  
*JOINT COMM POWD D, 050731 JOINT COMM PO
[9]  
*JOINT COMM POWD D, 320456 JOINT COMM PO
[10]   Chemical bath deposition of indium oxyhydroxysulfide thin films -: Effect of the bath on film composition [J].
Kaufmann, C ;
Bayón, R ;
Bohne, W ;
Röhrich, J ;
Klenk, R ;
Dobson, PJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (01) :C1-C9