Measurement of secondary electron emission coefficient (γ) of MgO protective layer with various crystallinities

被引:116
作者
Choi, EH [1 ]
Oh, HJ [1 ]
Kim, YG [1 ]
Ko, JJ [1 ]
Lim, JY [1 ]
Kim, JG [1 ]
Kim, DI [1 ]
Cho, G [1 ]
Kang, SO [1 ]
机构
[1] Kwangwoon Univ, PDP Res Ctr, Dept Electrophys, Charged Particle Beam & Plasma Lab, Seoul 139701, South Korea
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 12B期
关键词
secondary electron emission coefficient; MgO protective layer; crystallinity; Ar+ and Ne+ ions;
D O I
10.1143/JJAP.37.7015
中图分类号
O59 [应用物理学];
学科分类号
摘要
The secondary electron emission coefficient gamma of a MgO protective layer with various crystallinities has been successfully measured by the gamma-focused ion beam system with complete elimination of the charge accumulation problem by scanning-area adjustment techniques. It is found that the (111) surface has the highest gamma from 0.14 to 0.26 in comparison with the other films with (200) and (220) crystallinities for operating Ne+ ions, while ranged from 0.03 to 0.24 for Ar+ ions, under operating ion energies from 50 eV to 500 eV throughout this experiment. These observations explain why the (111) crystallinity of the MgO protective layer plays an important role in lowering the firing voltages in AC plasma display panel compared to the films with other crystallinities.
引用
收藏
页码:7015 / 7018
页数:4
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