Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation

被引：107

作者：

Lu, YF ^{[1
]}

Zhang, L ^{[1
]}

Song, WD ^{[1
]}

Zheng, YW ^{[1
]}

Luk'yanchuk, BS ^{[1
]}

机构：

[1] Natl Univ Singapore, Data Storage Inst, Dept Elect Engn, Laser Microproc Lab, Singapore 119260, Singapore

来源：

JETP LETTERS | 2000年 / 72卷 / 09期

基金：

俄罗斯基础研究基金会;

关键词：

D O I：

10.1134/1.1339899

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Spherical 0.5-mum silica particles were placed on a silicon (100) substrate. After laser illumination with a 248-nm KrF excimer laser, hillocks with size of about 100 nm were obtained at the original position of the particles. The mechanism of the formation of the subwavelength structure pattern was investigated and found to be the near-field optical resonance effect induced by particles on the surface. Theoretically calculated near-field light intensity distribution was presented, which was in agreement with the experimental result. The method of particle-enhanced laser irradiation has potential applications in nanolithography. (C) 2000 MAIK "Nauka/Interperiodica".

引用

页码：457 / 459

页数：3

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