Hard dense CrNx coatings on three-dimensional objects

被引：18

作者：

Hoy, R

Sloof, W

Janssen, GCAM

机构：

[1] Delft Univ Technol, Dept Mat Sci & Technol, NL-2628 AL Delft, Netherlands

[2] Delft Univ Technol, NIMR, NL-2628 AL Delft, Netherlands

来源：

SURFACE & COATINGS TECHNOLOGY | 2004年 / 179卷 / 2-3期

关键词：

Cr-N coatings; hardness; microstructure; Young's modulus;

D O I：

10.1016/S0257-8972(03)00863-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 [材料科学与工程]; 080502 [材料学];

摘要：

Thin CrNx coatings were deposited on steel in an industrial, Hauzer HC 750 PVD machine equipped with a bucket plasma source. The microstructure, deposition rate and chemical composition of the deposited coatings all depend on the applied bias voltage, the nitrogen flow and the deposition temperature. The results show a constant high hardness and Young's modulus for applied bias voltages above 50 V. Remarkably, the composition of the coating has only a small influence on the hardness and modulus. It was found that high hardness and high density correlate very well. (C) 2003 Elsevier B.V. All rights reserved.

引用

收藏

页码：215 / 222

页数：8

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