Observation of the ponderomotive effect in an inductive plasma

被引：39

作者：

Godyak, V ^{[1
]}

Piejak, R

Alexandrovich, B

Smolyakov, A

机构：

[1] OSRAM SYLVANIA, Beverly, MA 01915 USA

[2] Univ Saskatchewan, Saskatoon, SK S5N 5E2, Canada

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2001年 / 10卷 / 03期

关键词：

D O I：

10.1088/0963-0252/10/3/310

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A modification of the plasma density and the dc ambipolar potential profile by the ponderomotive force has been observed, for the first time, in an inductively coupled plasma (ICP) at low gas pressure. This ponderomotive effect was observed only at a low excitation frequency where the rf Lorentz force acting on electrons in the skin layer prevails over the rf electric field force. It is shown that this ponderomotive effect in an ICP is possible only at a condition of an anomalous skin effect when the classical formula for the ponderomotive force is no longer valid.

引用

收藏

页码：459 / 462

页数：4

相关论文

共 15 条

[1] Induced magnetic-field effects in inductively coupled plasmas [J].

Cohen, RH ;

Rognlien, TD .

PHYSICS OF PLASMAS, 1996, 3 (05) :1839-1847

[2] Electron kinetics in radio-frequency magnetic fields of inductive plasma sources [J].

Cohen, RH ;

Rognlien, TD .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (03) :442-452

[3] EQUILIBRIUM PROFILES FOR RF-PLASMA SOURCES WITH PONDEROMOTIVE FORCES [J].

DIPESO, G ;

ROGNLIEN, TD ;

VAHEDI, V ;

HEWETT, DW .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1995, 23 (04) :550-557

[4] 2-DIMENSIONAL SELF-CONSISTENT FLUID SIMULATION OF RADIO-FREQUENCY INDUCTIVE SOURCES [J].

DIPESO, G ;

VAHEDI, V ;

HEWETT, DW ;

ROGNLIEN, TD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (04) :1387-1396

[5]

Gaponov A.V., 1958, J. Expl Theor. Phys, V34, P242

[6] Nonlinear radio-frequency potential in an inductive plasma [J].

Godyak, V ;

Alexandrovich, B ;

Piejak, R ;

Smolyakov, A .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2000, 9 (04) :541-544

[7]

Godyak V, 1998, NATO ADV SCI I B-PHY, V367, P241

[8] Experimental setup and electrical characteristics of an inductively coupled plasma [J].

Godyak, VA ;

Piejak, RB ;

Alexandrovich, BM .

JOURNAL OF APPLIED PHYSICS, 1999, 85 (02) :703-712

[9] Hot plasma and nonlinear effects in inductive discharges [J].

Godyak, VA ;

Piejak, RB ;

Alexandrovich, BM ;

Kolobov, VI .

PHYSICS OF PLASMAS, 1999, 6 (05) :1804-1812

[10] Observation of second harmonic currents in inductively coupled plasmas [J].

Godyak, VA ;

Piejak, RB ;

Alexandrovich, BM .

PHYSICAL REVIEW LETTERS, 1999, 83 (08) :1610-1612