Experimental setup and electrical characteristics of an inductively coupled plasma

被引：96

作者：

Godyak, VA ^{[1
]}

Piejak, RB ^{[1
]}

Alexandrovich, BM ^{[1
]}

机构：

[1] OSRAM SYLVANIA Dev Inc, Beverly, MA 01915 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1999年 / 85卷 / 02期

关键词：

D O I：

10.1063/1.369150

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This article describes an experimental system that has been used to study inductively coupled plasma (ICP). The aim of this effort was to generate an experimental ICP database over a wide range of discharge conditions (power, frequency, and gas pressure) obtained in the same experimental device and using the same diagnostic means. Design of the experimental setup and diagnostics for measurement of ICP external electrical characteristics (coil voltage and current), power dissipated in plasma and radio frequency plasma potential are given here together with experimental results obtained over a wide range of discharge conditions. (C) 1999 American Institute of Physics. [S0021-8979(99)02302-6].

引用

页码：703 / 712

页数：10

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