Electromagnetic field structure in a weakly collisional inductively coupled plasma

被引：57

作者：

Godyak, VA ^{[1
]}

Piejak, RB ^{[1
]}

机构：

[1] Osram Sylvania Prod Inc, Beverly, MA 01915 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1997年 / 82卷 / 12期

关键词：

D O I：

10.1063/1.366496

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Two-dimensional, phase resolved magnetic probe measurements have been performed in a low pressure inductively coupled cylindrical plasma source driven with a planar coil. The rf electric field and current density distributions determined from these measurements exhibit an abnormal nonmonotonic spatial evolution. Formation of a second current layer, phase bifurcation and a reversal of the rf field phase velocity have been found and are attributed to spatial dispersion of the plasma conductivity due to collisionless electron thermal motion typical of anomalous skin effect. (C) 1997 American Institute of Physics.

引用

页码：5944 / 5947

页数：4

共 12 条

[1] PENETRATION OF AN ELECTROMAGNETIC WAVE INTO A HOT PLASMA SLAB [J].