COLLISIONLESS ELECTRON HEATING IN AN INDUCTIVELY-COUPLED DISCHARGE

被引：220

作者：

TURNER, MM

机构：

[1] School of Physical Sciences, Dublin City University, Glasnevin

来源：

PHYSICAL REVIEW LETTERS | 1993年 / 71卷 / 12期

关键词：

D O I：

10.1103/PhysRevLett.71.1844

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We present self-consistent simulations and analysis of the electron heating processes in an inductively coupled discharge. The results show that collisionless electron heating is predominant at pressures of 10 mTorr or less. The collisionless excitation mechanism is a warm plasma effect, analogous to the anomalous skin effect in metals.

引用

页码：1844 / 1847

页数：4

共 21 条

[1]

Babat G.I., 1947, J I ELECT ENG 3, V94, P27, DOI [10.1049/ji-3-2.1947.0005, DOI 10.1049/JI-3-2.1947.0005]

[2] ELECTRON-ENERGY DISTRIBUTION FUNCTION MEASUREMENTS IN A PLANAR INDUCTIVE OXYGEN RADIO-FREQUENCY GLOW-DISCHARGE [J].

BARNES, MS ;

FORSTER, JC ;

KELLER, JH .

APPLIED PHYSICS LETTERS, 1993, 62 (21) :2622-2624

[3] PARTICLE-IN-CELL CHARGED-PARTICLE SIMULATIONS, PLUS MONTE-CARLO COLLISIONS WITH NEUTRAL ATOMS, PIC-MCC [J].

BIRDSALL, CK .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :65-85

[4]

BIRDSALL CK, 1991, PLASMA PHYSICS VIA C

[5]

Chambers R. G., 1990, ELECTRONS METALS SEM

[6]

Godyak V.A., 1986, SOVIET RADIO FREQUEN

[7] ABNORMALLY LOW ELECTRON-ENERGY AND HEATING-MODE TRANSITION IN A LOW-PRESSURE ARGON RF DISCHARGE AT 13.56 MHZ [J].

GODYAK, VA ;

PIEJAK, RB .

PHYSICAL REVIEW LETTERS, 1990, 65 (08) :996-999

[8]

Hayashi M., IPPJAM19 NAG I TECHN

[9]

Hockney R. W., 1988, COMPUTER SIMULATION

[10] ELECTROMAGNETIC-FIELDS IN A RADIOFREQUENCY INDUCTION PLASMA [J].

HOPWOOD, J ;

GUARNIERI, CR ;

WHITEHAIR, SJ ;

CUOMO, JJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (01) :147-151

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