INSITU SIMULTANEOUS RADIO-FREQUENCY DISCHARGE POWER MEASUREMENTS

The power dissipated in a radio frequency (rf) discharge has been measured using three different techniques simultaneously. In one technique, the power dissipated in the matching network and in the discharge itself have been determined from rf voltage and in-line power measurements. Two other techniques based on voltage and current measurements have been used to calculate discharge power directly. Measurements based on all three techniques have been compared and are in good agreement. Typical results of these measurements are given for rf electroded discharges at 13.56 MHz in argon gas at pressures of 0.01 and 1.0 Torr. © 1990, American Vacuum Society. All rights reserved.