IMPEDANCE CHARACTERISTICS OF AN RF PARALLEL PLATE DISCHARGE AND THE VALIDITY OF A SIMPLE CIRCUIT MODEL

被引：36

作者：

BLETZINGER, P

FLEMMING, MJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 12期

关键词：

D O I：

10.1063/1.339019

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4688 / 4695

页数：8

共 26 条

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