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DUMMY LOAD TECHNIQUE FOR POWER EFFICIENCY ESTIMATION IN RF DISCHARGES
被引:8
作者
:
SAVAS, SE
论文数:
0
引用数:
0
h-index:
0
SAVAS, SE
HORNE, DE
论文数:
0
引用数:
0
h-index:
0
HORNE, DE
SADOWSKI, RW
论文数:
0
引用数:
0
h-index:
0
SADOWSKI, RW
机构
:
来源
:
REVIEW OF SCIENTIFIC INSTRUMENTS
|
1986年
/ 57卷
/ 07期
关键词
:
D O I
:
10.1063/1.1138636
中图分类号
:
TH7 [仪器、仪表];
学科分类号
:
0804 ;
080401 ;
081102 ;
摘要
:
引用
收藏
页码:1248 / 1250
页数:3
相关论文
共 8 条
[1]
ANISOTROPIC ETCHING OF SIO2 IN LOW-FREQUENCY CF4/O2 AND NF3/AR PLASMAS
DONNELLY, VM
论文数:
0
引用数:
0
h-index:
0
DONNELLY, VM
FLAMM, DL
论文数:
0
引用数:
0
h-index:
0
FLAMM, DL
DAUTREMONTSMITH, WC
论文数:
0
引用数:
0
h-index:
0
DAUTREMONTSMITH, WC
WERDER, DJ
论文数:
0
引用数:
0
h-index:
0
WERDER, DJ
[J].
JOURNAL OF APPLIED PHYSICS,
1984,
55
(01)
: 242
-
252
[2]
CRYSTALLOGRAPHIC ETCHING OF GAAS WITH BROMINE AND CHLORINE PLASMAS
IBBOTSON, DE
论文数:
0
引用数:
0
h-index:
0
IBBOTSON, DE
FLAMM, DL
论文数:
0
引用数:
0
h-index:
0
FLAMM, DL
DONNELLY, VM
论文数:
0
引用数:
0
h-index:
0
DONNELLY, VM
[J].
JOURNAL OF APPLIED PHYSICS,
1983,
54
(10)
: 5974
-
5981
[3]
ILIC DB, 1981, REV SCI INSTRUM, V52, P1542, DOI 10.1063/1.1136465
[4]
ELECTRICAL-PROPERTIES OF RF SPUTTERING SYSTEMS
KELLER, JH
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
KELLER, JH
PENNEBAKER, WB
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
PENNEBAKER, WB
[J].
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1979,
23
(01)
: 3
-
15
[5]
APPLICATION OF RF DISCHARGES TO SPUTTERING
KOENIG, HR
论文数:
0
引用数:
0
h-index:
0
KOENIG, HR
MAISSEL, LI
论文数:
0
引用数:
0
h-index:
0
MAISSEL, LI
[J].
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1970,
14
(02)
: 168
-
&
[6]
ELECTRICAL CHARACTERIZATION OF RADIO-FREQUENCY SPUTTERING GAS DISCHARGE
LOGAN, JS
论文数:
0
引用数:
0
h-index:
0
LOGAN, JS
MAZZA, NM
论文数:
0
引用数:
0
h-index:
0
MAZZA, NM
DAVIDSE, PD
论文数:
0
引用数:
0
h-index:
0
DAVIDSE, PD
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1969,
6
(01):
: 120
-
&
[7]
POWER DISSIPATED IN LOW-PRESSURE RADIO-FREQUENCY DISCHARGE PLASMAS
POPOV, OA
论文数:
0
引用数:
0
h-index:
0
机构:
MV LOMONOSOV STATE UNIV,DEPT PHYS,MOSCOW 117234,USSR
MV LOMONOSOV STATE UNIV,DEPT PHYS,MOSCOW 117234,USSR
POPOV, OA
GODYAK, VA
论文数:
0
引用数:
0
h-index:
0
机构:
MV LOMONOSOV STATE UNIV,DEPT PHYS,MOSCOW 117234,USSR
MV LOMONOSOV STATE UNIV,DEPT PHYS,MOSCOW 117234,USSR
GODYAK, VA
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
57
(01)
: 53
-
58
[8]
VANROOSMALEN AJ, UNPUB
←
1
→
共 8 条
[1]
ANISOTROPIC ETCHING OF SIO2 IN LOW-FREQUENCY CF4/O2 AND NF3/AR PLASMAS
DONNELLY, VM
论文数:
0
引用数:
0
h-index:
0
DONNELLY, VM
FLAMM, DL
论文数:
0
引用数:
0
h-index:
0
FLAMM, DL
DAUTREMONTSMITH, WC
论文数:
0
引用数:
0
h-index:
0
DAUTREMONTSMITH, WC
WERDER, DJ
论文数:
0
引用数:
0
h-index:
0
WERDER, DJ
[J].
JOURNAL OF APPLIED PHYSICS,
1984,
55
(01)
: 242
-
252
[2]
CRYSTALLOGRAPHIC ETCHING OF GAAS WITH BROMINE AND CHLORINE PLASMAS
IBBOTSON, DE
论文数:
0
引用数:
0
h-index:
0
IBBOTSON, DE
FLAMM, DL
论文数:
0
引用数:
0
h-index:
0
FLAMM, DL
DONNELLY, VM
论文数:
0
引用数:
0
h-index:
0
DONNELLY, VM
[J].
JOURNAL OF APPLIED PHYSICS,
1983,
54
(10)
: 5974
-
5981
[3]
ILIC DB, 1981, REV SCI INSTRUM, V52, P1542, DOI 10.1063/1.1136465
[4]
ELECTRICAL-PROPERTIES OF RF SPUTTERING SYSTEMS
KELLER, JH
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
KELLER, JH
PENNEBAKER, WB
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
PENNEBAKER, WB
[J].
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1979,
23
(01)
: 3
-
15
[5]
APPLICATION OF RF DISCHARGES TO SPUTTERING
KOENIG, HR
论文数:
0
引用数:
0
h-index:
0
KOENIG, HR
MAISSEL, LI
论文数:
0
引用数:
0
h-index:
0
MAISSEL, LI
[J].
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1970,
14
(02)
: 168
-
&
[6]
ELECTRICAL CHARACTERIZATION OF RADIO-FREQUENCY SPUTTERING GAS DISCHARGE
LOGAN, JS
论文数:
0
引用数:
0
h-index:
0
LOGAN, JS
MAZZA, NM
论文数:
0
引用数:
0
h-index:
0
MAZZA, NM
DAVIDSE, PD
论文数:
0
引用数:
0
h-index:
0
DAVIDSE, PD
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1969,
6
(01):
: 120
-
&
[7]
POWER DISSIPATED IN LOW-PRESSURE RADIO-FREQUENCY DISCHARGE PLASMAS
POPOV, OA
论文数:
0
引用数:
0
h-index:
0
机构:
MV LOMONOSOV STATE UNIV,DEPT PHYS,MOSCOW 117234,USSR
MV LOMONOSOV STATE UNIV,DEPT PHYS,MOSCOW 117234,USSR
POPOV, OA
GODYAK, VA
论文数:
0
引用数:
0
h-index:
0
机构:
MV LOMONOSOV STATE UNIV,DEPT PHYS,MOSCOW 117234,USSR
MV LOMONOSOV STATE UNIV,DEPT PHYS,MOSCOW 117234,USSR
GODYAK, VA
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
57
(01)
: 53
-
58
[8]
VANROOSMALEN AJ, UNPUB
←
1
→