Scanning near-field cathodoluminescence microscopy

被引：43

作者：

Troyon, M ^{[1
]}

Pastré, D ^{[1
]}

Jouart, JP ^{[1
]}

Beaudoin, JL ^{[1
]}

机构：

[1] Univ Reims, Unite Therm & Anal Phys, F-51685 Reims 2, France

来源：

ULTRAMICROSCOPY | 1998年 / 75卷 / 01期

关键词：

cathodoluminescence; near-field microscopy; scanning electron microscopy;

D O I：

10.1016/S0304-3991(98)00049-7

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A new set-up for cathodoluminescence (CL) studies is described. It combines a scanning near-field optical/force microscopy (SNOM/SFM) with a scanning electron microscopy (SEM). This hybrid instrument allows one to image a sample conventionally by SEM, to investigate by SFM the local topography and to simultaneously perform CL imaging. The results of our initial efforts to improve the resolution limit of the classical SEM cathodoluminescent systems are reported. For the first time CL images with a resolution of 100 nm are obtained. (C) 1998 Elsevier Science B.V. All rights reserved.

引用

页码：15 / 21

页数：7

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