Future applications for parallel probes, including probe-based data storage and probe lithography, demand that probe technologies achieve patterning rates in the megahertz per probe range at feature sizes below 30 nm, i.e. similar to 1 Tbit in(-2). If thermo-mechanical indentation of polymers is employed, some uncertainty remains as to whether the physics governing the indentation kinetics at these short timescales permits the fast indentation processes required. We demonstrate the feasibility of using polymer media for thermo-mechanical probe storage or lithography, at sliding speeds of 15 mm s(-1) and sub-microsecond indentation times, which fall into this previously untapped regime.
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Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
Cho, Y
;
Hashimoto, S
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Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
Hashimoto, S
;
Odagawa, N
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Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
Odagawa, N
;
Tanaka, K
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Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
Tanaka, K
;
Hiranaga, Y
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Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
机构:
Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
Cho, Y
;
Hashimoto, S
论文数: 0引用数: 0
h-index: 0
机构:
Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
Hashimoto, S
;
Odagawa, N
论文数: 0引用数: 0
h-index: 0
机构:
Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
Odagawa, N
;
Tanaka, K
论文数: 0引用数: 0
h-index: 0
机构:
Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
Tanaka, K
;
Hiranaga, Y
论文数: 0引用数: 0
h-index: 0
机构:
Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan