A cylindrical micro ultrasonic motor using PZT thin film deposited by single process hydrothermal method (φ 2.4 mm, L = 10 mm stator transducer)

被引：93

作者：

Morita, T ^{[1
]}

Kurosawa, MK ^{[1
]}

Higuchi, T ^{[1
]}

机构：

[1] Univ Tokyo, Grad Sch Engn, Dept Precis Machinery Engn, Bunkyo Ku, Tokyo 1138656, Japan

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1998年 / 45卷 / 05期

基金：

日本学术振兴会;

关键词：

D O I：

10.1109/58.726441

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

micro ultrasonic motor using PZT (lead zirconate titanate) thin film has been improved by a single process hydrothermal method. The hydrothermal method is a unique method for depositing PZT thin film in a solution. An earlier reported hydrothermal method consisted of two linked processes. Our new method, however, has only a single process. Hence, less distribution of chemical components of the PZT film contributes to a higher efficiency of the stator transducer. The piezoelectric factor dal was -30 pC/N for this new method, which is six times larger than that of the previous method. The output torque of the micro ultrasonic motor fabricated by the single process hydrothermal method was measured. The output torque was 7.0 mu Nm, and the maximum revolution speed was 880 rpm at 15 Vp-p driving voltage.

引用

页码：1178 / 1187

页数：10

共 17 条

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