Semiconductor gas sensor based on Pd-doped SnO2 nanorod thin films

被引：146

作者：

Lee, Y. C. ^{[1
]}

Huang, Hui ^{[1
]}

Tan, O. K. ^{[1
]}

Tse, M. S. ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Sensors & Actuators Lab, Singapore 639798, Singapore

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2008年 / 132卷 / 01期

关键词：

SnO2; nanorod thin film; Pd doping; gas sensing;

D O I：

10.1016/j.snb.2008.01.028

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

SnO2 nanorod thin films have been prepared by plasma-enhanced chemical vapor deposition (PECVD) with postplasma. treatment. The SnO2 nanorod thin films were surface modified with Pd nanoparticles and their sensing properties towards H-2 and ethanol gas were studied. It was found that the Pd-doped SnO2 nanorod thin film sensor exhibits 6 and 2.5 times better response to 1000 ppm H-2 and ethanol at 300 degrees C compared to the un-doped sample. The improved gas-sensing properties were believed to result from the formation of electron depletion layer and enhanced catalytic dissociation of molecular adsorbates on the Pd nanoparticle surfaces. (C) 2008 Elsevier B.V. All rights reserved.

引用

收藏

页码：239 / 242

页数：4

相关论文

共 19 条

[1] Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts [J].

Comini, E ;

Faglia, G ;

Sberveglieri, G ;

Pan, ZW ;

Wang, ZL .

APPLIED PHYSICS LETTERS, 2002, 81 (10) :1869-1871

[2] Sol-gel derived pure and palladium activated tin oxide films for gas-sensing applications [J].

De, G ;

Licciulli, A ;

Massaro, C ;

Quirini, A ;

Rella, R ;

Siciliano, P ;

Vasanelli, L .

SENSORS AND ACTUATORS B-CHEMICAL, 1999, 55 (2-3) :134-139

[3] Semiconductor gas sensor based on tin oxide nanorods prepared by plasma-enhanced chemical vapor deposition with postplasma treatment [J].

Huang, H ;

Tan, OK ;

Lee, YC ;

Tran, TD ;

Tse, MS ;

Yao, X .

APPLIED PHYSICS LETTERS, 2005, 87 (16) :1-3

[4] Effects of plasma treatment on the growth of SnO2 nanorods from SnO2 thin films [J].

Huang, H ;

Tan, OK ;

Lee, YC ;

Tse, MS ;

Guo, J ;

White, T .

NANOTECHNOLOGY, 2006, 17 (03) :743-746

[5] In situ growth of SnO2 nanorods by plasma treatment of SnO2 thin films [J].

Huang, Hui ;

Tan, O. K. ;

Lee, Y. C. ;

Tse, M. S. ;

Guo, J. ;

White, T. .

NANOTECHNOLOGY, 2006, 17 (15) :3668-3672

[6] Detection of CO and O2 using tin oxide nanowire sensors [J].

Kolmakov, A ;

Zhang, YX ;

Cheng, GS ;

Moskovits, M .

ADVANCED MATERIALS, 2003, 15 (12) :997-+

[7] Enhanced gas sensing by individual SnO2 nanowires and nanobelts functionalized with Pd catalyst particles [J].

Kolmakov, A ;

Klenov, DO ;

Lilach, Y ;

Stemmer, S ;

Moskovits, M .

NANO LETTERS, 2005, 5 (04) :667-673

[8] Gas response control through structural and chemical modification of metal oxide films: state of the art and approaches [J].

Korotcenkov, G .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 107 (01) :209-232

[9] Influence of surface Pd doping on gas sensing characteristics of SnO2 thin films deposited by spray pirolysis [J].

Korotcenkov, G ;

Brinzari, V ;

Boris, Y ;

Ivanova, M ;

Schwank, J ;

Morante, J .

THIN SOLID FILMS, 2003, 436 (01) :119-126

[10]

Law M, 2002, ANGEW CHEM INT EDIT, V41, P2405, DOI 10.1002/1521-3773(20020703)41:13<2405::AID-ANIE2405>3.0.CO