A comparison of aluminum nitride freely nucleated and seeded on 6H-silicon carbide

被引:12
作者
Edgar, JH
Robins, LH
Coatney, SE
Liu, L
Chaudhuri, J
Ignatiev, K
Rek, Z
机构
[1] Kansas State Univ, Dept Chem Engn, Manhattan, KS 66506 USA
[2] NIST, Div Ceram, Gaithersburg, MD 20899 USA
[3] Wichita State Univ, Dept Mech Engn, Wichita, KS 67260 USA
[4] Stanford Synchrotron Radiat Lab, Stanford, CA 94305 USA
来源
SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2 | 2000年 / 338-3卷
关键词
bulk crystal growth; cathodoluminescence; Raman spectroscopy; X-ray topography;
D O I
10.4028/www.scientific.net/MSF.338-342.1599
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The crystal quality, vibrational and luminescence properties of AlN crystals prepared by the sublimation-recondensation method with free nucleation on the crucible walls or seeded growth on 6H-SiC wafers were compared. Freely nucleated needles and platelets exhibited near-band-edge cathodoluminescence, narrow Raman peak widths, and a relatively low dislocation density as revealed by synchrotron white-beam x-ray topography. In contrast, thick films deposited on on-axis, (0001) 6H-silicon carbide wafers exhibited luminescence only at 3.5 eV, had much broader Raman peak widths, and a mosaic crystal structure.
引用
收藏
页码:1599 / 1602
页数:4
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