Morphology and X-ray diffraction peak widths of aluminum nitride single crystals prepared by the sublimation method

被引:98
作者
Tanaka, M
Nakahata, S
Sogabe, K
Nakata, H
Tobioka, M
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1997年 / 36卷 / 8B期
关键词
AlN; nitride; single crystal; sublimation; characterization; rocking curve; bulk;
D O I
10.1143/JJAP.36.L1062
中图分类号
O59 [应用物理学];
学科分类号
摘要
AIN single crystal is one of the promising materials for substrates of GaN-based laser diodes. We prepared aluminum nitride single crystals by the sublimation method and characterized them. The crystals are transparent and slightly yellow. Some crystals are needle-shaped with a hexagonal cross section, diameter of 0.5 mm and length of 3 mm, grown parallel to \001\. Other crystals are plate-shaped with a maximum width of 3 mm, 5 mm length and 0.5 mm thickness, grown with a large (001) face. Also, other crystals are needle-shaped with a rectangular cross section, width of 1 mm, 7 mm length and 0.3 mm thickness, grown with a large (101) face. Their widths of X-ray rocking curves is about 39 arcsec, with a full width at half-maximum, 203 arcsec and 12 arcsec, respectively. The orientation of AIN single crystal axis is sufficient for use in substrates for GaN-based diodes.
引用
收藏
页码:L1062 / L1064
页数:3
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