Humidity sensing properties of Li-iron oxide based thin films

被引：45

作者：

Neri, G

Bonavita, A

Galvagno, S

Pace, C

Patanè, S

Arena, A

机构：

[1] Univ Messina, Dipartimento Chim Ind & Ingn Mat, I-98166 Messina, Italy

[2] Univ Messina, Dipartimento Fis Mat & Tecnol Fis Avanzate, Unita INFM, I-98166 Messina, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 73卷 / 2-3期

关键词：

humidity sensors; thin films; iron oxide; Li-doped iron oxide;

D O I：

10.1016/S0925-4005(00)00679-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Li-doped iron oxide thin films deposited on a porous ceramic substrate by a liquid-phase method (LPD) were investigated as humidity sensors. Large variations in the resistance, up to about 4-5 order of magnitude, were observed by changing the relative humidity (RH) between 10 and 90%. The investigated sensors show a quick and reversible response to cyclic variations in the RH. The effects of pretreatment and Li content were investigated. The role of Li on the response to water vapour of iron oxide thin films is discussed. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：89 / 94

页数：6

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