A transparent metal:: Nb-doped anatase TiO2 -: art. no. 252101

被引:695
作者
Furubayashi, Y [1 ]
Hitosugi, T
Yamamoto, Y
Inaba, K
Kinoda, G
Hirose, Y
Shimada, T
Hasegawa, T
机构
[1] Kanagawa Acad Sci & Technol, KAST, Kawasaki, Kanagawa 2130012, Japan
[2] Univ Tokyo, Dept Chem, Tokyo 1130033, Japan
[3] Tokyo Inst Technol, Frontier Collaborat Res Ctr, Yokohama, Kanagawa 2268503, Japan
关键词
D O I
10.1063/1.1949728
中图分类号
O59 [应用物理学];
学科分类号
摘要
This Letter focuses on the discovery of a transparent conducting oxide (TCO), anatase Ti1-xNbxO2 films with x=0.002-0.2. The resistivity of films with x >= 0.03 is 2-3x10(-4) Omega cm at room temperature. The carrier density of Ti1-xNbxO2 can be controlled in a range of 1x10(19) to 2x10(21) cm(-3). The internal transmittance for films with x <= 0.03 (40 nm thickness) is about 97% in the visible light region. The transport and optical parameters are comparable to those of typical TCOs, such as In2-xSnxO3 and ZnO. (c) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
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