Microfabrication by use of a spatial light modulator in the ultraviolet: experimental results

被引:36
作者
Farsari, M [1 ]
Huang, S [1 ]
Birch, P [1 ]
Claret-Tournier, F [1 ]
Young, R [1 ]
Budgett, D [1 ]
Bradfield, C [1 ]
Chatwin, C [1 ]
机构
[1] Univ Sussex, Sch Engn, Laser & Photon Syst Res Grp, Brighton BN1 9QT, E Sussex, England
关键词
D O I
10.1364/OL.24.000549
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report the development of a new microstereophotolithography technique for creation of three-dimensional microcomponents by use of a planar, layer-by-layer process of exposure, in which a spatial light modulator is used as a dynamic lithographic mask. The system operates in the UV to take advantage of the wide supply of commercially available photopolymers designed for conventional stereolithography. With this novel procedure it is possible to build components with feature sizes as small as a few micrometers. The experimental setup is briefly described, and the first microcomponent fabricated by this system is shown. (C) 1999 Optical Society of America.
引用
收藏
页码:549 / 550
页数:2
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