Thermally stable organic-inorganic hybrid photoresists for fabrication of photonic band gap structures with direct laser writing

被引：40

作者：

Jun, Yoonho ^{[1
]}

Nagpal, Prashant ^{[1
]}

Norris, David J. ^{[1
]}

机构：

[1] Univ Minnesota, Dept Chem Engn & Mat Sci, Minneapolis, MN 55455 USA

来源：

ADVANCED MATERIALS | 2008年 / 20卷 / 03期

关键词：

D O I：

10.1002/adma.200702021

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A recently developed methylsilses-quioxane-based photoresist is combined with direct laser writing to define 3D microstructures (see image). Because the resulting structures exhibit thermal stability above 500 degrees C without cracking or significant distortions, they should allow photonic crystals and other microstructures to be obtained from a large variety of materials. This is demonstrated by infiltrating a "woodpile" photonic crystal with silicon using chemical vapor deposition.

引用

页码：606 / +

页数：6

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