The fabrication of nanocrystalline diamond films using hot filament CVD

被引：72

作者：

Wang, T ^{[1
]}

Xin, HW ^{[1
]}

Zhang, ZM ^{[1
]}

Dai, YB ^{[1
]}

Shen, HS ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Res Inst Micro Nano Sci & Technol, Shanghai 200030, Peoples R China

来源：

关键词：

nanocrystalline; diamond films; grain size; Raman spectroscopy;

D O I：

10.1016/j.diamond.2003.08.014

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

By decreasing reacting gas pressure, nanocrystalline diamond films, the area of which reaches 2 inches were deposited with hot filament chemical vapor deposition (HFCVD) equipment. According to the analysis with high-resolution transmission electron microscopy (HRTEM), the grain size averages approximately 4-8 urn and the nanometer crystalline diamond grains are surrounded by amorphous ingredient. The sharp diamond and graphite peak can be shown by ultraviolet (UV) (244 nm) Raman spectroscopy. The wire drawing die coated by common diamond film and this film can last more than 10-fold move than that coated by common hard alloy. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：6 / 13

页数：8

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