Synthesis of nanocrystalline diamond by the direct ion beam deposition method

被引：14

作者：

Sun, XS ^{[1
]}

Wang, N ^{[1
]}

Zhang, WJ ^{[1
]}

Woo, HK ^{[1
]}

Han, XD ^{[1
]}

Bello, I ^{[1
]}

Lee, CS ^{[1
]}

Lee, ST ^{[1
]}

机构：

[1] City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, Hong Kong, Peoples R China

来源：

JOURNAL OF MATERIALS RESEARCH | 1999年 / 14卷 / 08期

关键词：

D O I：

10.1557/JMR.1999.0432

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanocrystalline diamond has been synthesized on a mirror-polished Si(001) substrate by means of direct ion beam deposition. Low-energy (80-200 eV) hydrocarbon and hydrogen ions, generated in a Kaufman ion source, were used to bombard the substrates. The bombarded samples were characterized by high-resolution transmission electron microscopy and Raman spectroscopy. Nanocrystalline diamond particles of random orientation were observed in a matrix of amorphous carbon film on the Si(001) substrate. The size of the nanocrystalline diamond particles varied in the range of 50-300 Angstrom. The mechanism of ion-induced formation of nanocrystalline diamond is discussed.

引用

页码：3204 / 3207

页数：4

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