Synchrotron radiation micromachining of polymers to produce high-aspect-ratio microparts

被引：37

作者：

Zhang, YP

Katoh, T

机构：

[1] Sumitomo Heavy Industries, Ltd, Tokyo

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1996年 / 35卷 / 2A期

关键词：

synchrotron radiation; micromachining; high aspect ratio; PTFE;

D O I：

10.1143/JJAP.35.L186

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Synchrotron radiation (SR) direct micromachining of polymers was developed and high-aspect-ratio microparts of polytetrafluoroethylene (PTFE) were made. The limitation of critical dependence on the photon flux was eliminated by processing PTFE at a temperature of 200-250 degrees C, so that the process was greatly simplified and the aspect-ratios were improved with reducing the smallest surface detail to less than ten microns and achieving the largest structural height of one thousand microns. The decomposition mechanism was discussed with a comparison between the SR micromachining and laser ablation.

引用

收藏

页码：L186 / L188

页数：3

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