Novel impedance interface for resonant high-temperature gas sensors

被引:20
作者
Schneider, T
Richter, D
Doerner, S
Fritze, H
Hauptmann, P
机构
[1] Otto Von Guericke Univ, Inst Micro & Sensor Syst, D-39106 Magdeburg, Germany
[2] Tech Univ Clausthal, Dept Phys Met & Mat Sci, D-38678 Clausthal Zellerfeld, Germany
关键词
interface electronics; impedance analyzer; high-temperature gas sensors; langasite resonator;
D O I
10.1016/j.snb.2005.06.034
中图分类号
O65 [分析化学];
学科分类号
070302 [分析化学]; 081704 [应用化学];
摘要
In order to analyze the behavior of resonant high-temperature gas sensor, the measurement of frequency shift and of resistance change is suitable. Therefore, fast impedance analysis based interface electronics has been developed to measure the frequency shift and the high damping of such resonant sensors. By using a direct-sampling-technique, the quantity of analog components is reduced. In consequence, the measurement period and offset compensation have been improved. An application example for highly damped resonant high-temperature gas sensors is described, based on langasite resonator with titanium dioxide film acting as an oxygen partial pressure sensor at high-temperature process environments. In contrast with commercial impedance analyzer this interface electronics is realized on a single printed circuit board which is well suited for industrial sensor applications based on impedance spectroscopy. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:187 / 192
页数:6
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