Langasite for high-temperature bulk acoustic wave applications

被引：123

作者：

Fritze, H ^{[1
]}

Tuller, HL

机构：

[1] Tech Univ Clausthal, Dept Phys Met & Mat Sci, D-38678 Clausthal Zellerfeld, Germany

[2] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

来源：

APPLIED PHYSICS LETTERS | 2001年 / 78卷 / 07期

关键词：

D O I：

10.1063/1.1345797

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Langasite (La3Ga5SiO14) and related compounds are promising candidates for high-temperature piezoelectric applications. To determine the stable operation of langasite as a high-temperature bulk acoustic wave (BAW) resonator, we characterized electrical conductivity [sigma (el)=1.56xexp(-1.07 eV/kT)S/cm] and oxygen diffusivity [D-ox(T)=5x10(-5) exp(-1.45 eV/kT)cm(2)/s] up to elevated temperatures. Langasite was successfully operated up to 900 degreesC as a BAW resonator with an average mass sensitivity of about 0.17 mug Hz(-1) cm(-2). This enables, in principle, high-temperature monitoring of deposition rates and thermogravimetry with high sensitivity. (C) 2001 American Institute of Physics.

引用

页码：976 / 977

页数：2

共 7 条

[1] Validation of the frequency shift of thickness-shear-mode resonators in liquids - Determination of the activation energy of viscosity [J].

Bund, A ;

Schwitzgebel, G .

BERICHTE DER BUNSEN-GESELLSCHAFT-PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 1997, 101 (12) :1960-1962

[2] Materials for high temperature piezoelectric transducers [J].

Damjanovic, D .

CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE, 1998, 3 (05) :469-473

[3] Surface acoustic wave sensors for high-temperature applications [J].

Hornsteiner, J ;

Born, E ;

Fischerauer, G ;

Riha, E .

PROCEEDINGS OF THE 1998 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, 1998, :615-620

[4] Surface exchange of oxygen in mixed conducting perovskite oxides [J].

Kilner, JA ;

DeSouza, RA ;

Fullarton, IC .

SOLID STATE IONICS, 1996, 86-8 :703-709

[5] MASS-TRANSPORT IN THE PRESENCE OF INTERNAL DEFECT REACTIONS - CONCEPT OF CONSERVATIVE ENSEMBLES .4. TRACER DIFFUSION AND INTERCORRELATION WITH CHEMICAL DIFFUSION AND ION CONDUCTIVITY [J].

MAIER, J .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1993, 76 (05) :1228-1232

[6]

Shewon P. G., 1963, DIFFUSION SOLIDS

[7] Growth and characterization of lanthanum gallium silicate La3Ga5SiO14 single crystals for piezoelectric applications [J].

Shimamura, K ;

Takeda, H ;

Kohno, T ;

Fukuda, T .

JOURNAL OF CRYSTAL GROWTH, 1996, 163 (04) :388-392

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