Applicability of Raman scattering for the characterization of nanocrystalline silicon

被引：154

作者：

Ossadnik, C

Veprek, S

Gregora, I

机构：

[1] Tech Univ Munich, Inst Chem Inorgan Mat, D-85747 Garching, Germany

[2] Acad Sci Czech Republ, Inst Phys, CZ-18040 Prague 8, Czech Republic

来源：

THIN SOLID FILMS | 1999年 / 337卷 / 1-2期

关键词：

Raman scattering; nanocrystalline silicon;

D O I：

10.1016/S0040-6090(98)01175-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

It is shown that Raman scattering alone cannot provide unambiguous information regarding the crystallite size, its distribution and crystalline fraction in nc-/a-Si films unless additional data regarding the structure of the films are obtained by other techniques. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：148 / 151

页数：4

共 35 条

[1] EXPERIMENTAL-DETERMINATION OF THE NANOCRYSTALLINE VOLUME FRACTION IN SILICON THIN-FILMS FROM RAMAN-SPECTROSCOPY
BUSTARRET, E
HACHICHA, MA
BRUNEL, M
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (20) : 1675 - 1677
[2] MODELING THE RAMAN-SPECTRUM OF THE AMORPHOUS-CRYSTAL SI SYSTEM
CARRICO, AS
ELLIOTT, RJ
BARRIO, RA
[J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1986, 19 (08): : 1113 - 1122
[3] Microstructure of novel superhard nanocrystalline amorphous composites as analyzed by high resolution transmission electron microscopy
Christiansen, S
Albrecht, M
Strunk, HP
Veprek, S
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (01): : 19 - 22
[4] ANISOTROPIC AND POLARIZATION EFFECTS IN RAMAN-SCATTERING IN POROUS SILICON
GREGORA, I
CHAMPAGNON, B
SAVIOT, L
MONIN, Y
[J]. THIN SOLID FILMS, 1995, 255 (1-2) : 139 - 142
[5] RAMAN INVESTIGATION OF LIGHT-EMITTING POROUS SILICON LAYERS - ESTIMATE OF CHARACTERISTIC CRYSTALLITE DIMENSIONS
GREGORA, I
CHAMPAGNON, B
HALIMAOUI, A
[J]. JOURNAL OF APPLIED PHYSICS, 1994, 75 (06) : 3034 - 3039
[6] GREGORA I, 1992, J LUMIN, V57, P73
[7] IGBAL Z, 1983, J PHYS C SOLID STATE, V16, P2005
[8] INGELS M, 1990, MATER RES SOC SYMP P, V164, P229
[9] RAMAN-SCATTERING FROM SMALL PARTICLE-SIZE POLYCRYSTALLINE SILICON
IQBAL, Z
VEPREK, S
WEBB, AP
CAPEZZUTO, P
[J]. SOLID STATE COMMUNICATIONS, 1981, 37 (12) : 993 - 996
[10] RAMAN-SCATTERING FROM HYDROGENATED MICROCRYSTALLINE AND AMORPHOUS-SILICON
IQBAL, Z
VEPREK, S
[J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1982, 15 (02): : 377 - 392

← 1 2 3 4 →