Resonator size effects on the TFBAR ladder filter performance

被引：8

作者：

Kim, KW ^{[1
]}

Gu, MG

Yook, JG

Park, HK

机构：

[1] Yonsei Univ, Dept Elect & Elect Engn, Seoul 120749, South Korea

[2] MEMS Solut Inc, Seoul 120749, South Korea

来源：

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS | 2003年 / 13卷 / 08期

关键词：

ladder; resonator size effect; RF MEMS; TFBAR filter;

D O I：

10.1109/LMWC.2003.815689

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thin-film bulk acoustic resonators with different resonator sizes are simulated and measured. Their effects on ladder filter performance are also presented. Aluminum nitride and platinum are used as piezoelectric material and electrodes, respectively. As the shunt resonator size increases, out-of-band rejection performance has been improved. The 3/2 stage filters that have twice or three times larger resonators reveal 6 dB and 11 dB out-of-band rejection improvements, respectively.

引用

页码：335 / 337

页数：3

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