Chip-Scale Nanofabrication of Single Spins and Spin Arrays in Diamond

被引：240

作者：

Toyli, David M. ^{[1
]}

Weis, Christoph D. ^{[2
]}

Fuchs, Gregory D. ^{[1
]}

Schenkel, Thomas ^{[2
]}

Awschalom, David D. ^{[1
]}

机构：

[1] Univ Calif Santa Barbara, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA

[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Ion Beam Technol Grp, Berkeley, CA 94720 USA

来源：

NANO LETTERS | 2010年 / 10卷 / 08期

关键词：

Single spin; quantum computation; spintronics; nitrogen vacancy; diamond; ion implantation; DYNAMICS; DEFECT;

D O I：

10.1021/nl102066q

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100-nm length scales. Secondary ion mass spectroscopy measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.

引用

页码：3168 / 3172

页数：5

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