Redistribution of nitrogen implanted in the crystals of synthetic diamond

The redistribution of nitrogen atoms implanted in synthetic diamond crystals was investigated by secondary ion mass-spectrometry in course of an isothermal annealing program at 1400 degreesC during 1, 5 and 20 h. It was shown that the nitrogen profiles spread at a macroscopic scale, and the broadening is well described in terms of the diffusion movement of impurity atoms. The preliminary estimates of diffusion coefficients were obtained: 2.3 x 10(-15) cm(2)/s for 1 h annealing, 8.5 x 10(-16) cm(2)/s for 5 h annealing and 3.7 x 10(-16) cm(2)/s for 20 h annealing. (C) 2001 Elsevier Science B.V. All rights reserved.