Microfabrication of interdigitated polyaniline/polymethylene patterns on a gold surface

被引:30
作者
Tao, YT [1 ]
Pandian, K [1 ]
Lee, WC [1 ]
机构
[1] Acad Sinica, Inst Chem, Taipei, Taiwan
关键词
D O I
10.1021/la980767t
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Micrometer scale patterns of polymethylene film was prepared by selective formation of polymethylene on a gold surface patterned with an organothiol monolayer as the resist. The monolayer effectively retarded the gold-catalyzed polymerization reaction from diazomethane. The polymethylene film, in the thickness range of 300-400 Angstrom, in turn serves as a stable resist in preventing electrochemical polymerization of polyaniline on the covered area. Selective deposition was thus achieved to give interdigitated patterns of conducting and insulating polymer films.
引用
收藏
页码:6158 / 6166
页数:9
相关论文
共 47 条
[1]   USING MICROMACHINING, MOLECULAR SELF-ASSEMBLY, AND WET ETCHING TO FABRICATE 0.1-1-MU-M-SCALE STRUCTURES OF GOLD AND SILICON [J].
ABBOTT, NL ;
KUMAR, A ;
WHITESIDES, GM .
CHEMISTRY OF MATERIALS, 1994, 6 (05) :596-602
[2]   MANIPULATION OF THE WETTABILITY OF SURFACES ON THE 0.1-MICROMETER TO 1-MICROMETER SCALE THROUGH MICROMACHINING AND MOLECULAR SELF-ASSEMBLY [J].
ABBOTT, NL ;
FOLKERS, JP ;
WHITESIDES, GM .
SCIENCE, 1992, 257 (5075) :1380-1382
[3]   MODELING ORGANIC-SURFACES WITH SELF-ASSEMBLED MONOLAYERS [J].
BAIN, CD ;
WHITESIDES, GM .
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION IN ENGLISH, 1989, 28 (04) :506-512
[4]   FORMATION OF MONOLAYER FILMS BY THE SPONTANEOUS ASSEMBLY OF ORGANIC THIOLS FROM SOLUTION ONTO GOLD [J].
BAIN, CD ;
TROUGHTON, EB ;
TAO, YT ;
EVALL, J ;
WHITESIDES, GM ;
NUZZO, RG .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1989, 111 (01) :321-335
[5]  
Bellamy L. J., 1954, The Infrared Spectra of Complex Molecules
[6]   DEEP UV PHOTOCHEMISTRY AND PATTERNING OF SELF-ASSEMBLED MONOLAYER FILMS [J].
CALVERT, JM ;
GEORGER, JH ;
PECKERAR, MC ;
PEHRSSON, PE ;
SCHNUR, JM ;
SCHOEN, PE .
THIN SOLID FILMS, 1992, 210 (1-2) :359-363
[7]   POLYMERIC SELF-ASSEMBLED MONOLAYERS .3. PATTERN TRANSFER BY USE OF PHOTOLITHOGRAPHY, ELECTROCHEMICAL METHODS, AND AN ULTRATHIN, SELF-ASSEMBLED DIACETYLENIC RESIST [J].
CHAN, KC ;
KIM, T ;
SCHOER, JK ;
CROOKS, RM .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1995, 117 (21) :5875-5876
[8]   STRUCTURES OF SELF-ASSEMBLED MONOLAYERS OF AROMATIC-DERIVATIZED THIOLS ON EVAPORATED GOLD AND SILVER SURFACES - IMPLICATION ON PACKING MECHANISM [J].
CHANG, SC ;
CHAO, I ;
TAO, YT .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1994, 116 (15) :6792-6805
[9]   COADSORPTION OF FERROCENE-TERMINATED AND UNSUBSTITUTED ALKANETHIOLS ON GOLD - ELECTROACTIVE SELF-ASSEMBLED MONOLAYERS [J].
CHIDSEY, CED ;
BERTOZZI, CR ;
PUTVINSKI, TM ;
MUJSCE, AM .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1990, 112 (11) :4301-4306
[10]   Imprint lithography with 25-nanometer resolution [J].
Chou, SY ;
Krauss, PR ;
Renstrom, PJ .
SCIENCE, 1996, 272 (5258) :85-87